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Texas State University Nanofabrication Research Service Center Core Facility (RRID:SCR_028199)Copy Citation Copied
URL: https://cro.txst.edu/nanofabrication-equipment/cro-nrsc-deposition.html
Proper Citation: Texas State University Nanofabrication Research Service Center Core Facility (RRID:SCR_028199)
Description: Multi-user clean room facility where students and researchers can fabricate films, structures, and devices at micrometer and nanometer scale. Users must enter through the gowning area that contains garments required to protect the cleanroom from particles. The class 10,000 instruction area houses high temperature furnaces, physical vapor deposition systems, wet chemical benches, chemical storage, and electrical test equipment utilized by undergraduate courses. The class 1000 research area houses deposition, etching, thermal treatment, and metrology equipment to support sponsored research and graduate coursework. The class 100 research space hosts the most sensitive lithography process equipment. The utility chase houses support equipment such as water cooling, vacuum pumps, exhaust abatement, and compressed gas delivery systems.
Synonyms: Texas State University Nanofabrication Research Service Center (NRSC)
Resource Type: core facility, service resource, access service resource
Keywords: ABRF, fabricate films, structures, devices, micrometer and nanometer scale,
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