Searching the RRID Resource Information Network

Our searching services are busy right now. Please try again later

  • Register
X
Forgot Password

If you have forgotten your password you can enter your email here and get a temporary password sent to your email.

X

Leaving Community

Are you sure you want to leave this community? Leaving the community will revoke any permissions you have been granted in this community.

No
Yes
Resource Name
PDF Report How to cite
Texas State University Nanofabrication Research Service Center Core Facility (RRID:SCR_028199)
Copy Citation Copied
Resource Information

URL: https://cro.txst.edu/nanofabrication-equipment/cro-nrsc-deposition.html

Proper Citation: Texas State University Nanofabrication Research Service Center Core Facility (RRID:SCR_028199)

Description: Multi-user clean room facility where students and researchers can fabricate films, structures, and devices at micrometer and nanometer scale. Users must enter through the gowning area that contains garments required to protect the cleanroom from particles. The class 10,000 instruction area houses high temperature furnaces, physical vapor deposition systems, wet chemical benches, chemical storage, and electrical test equipment utilized by undergraduate courses. The class 1000 research area houses deposition, etching, thermal treatment, and metrology equipment to support sponsored research and graduate coursework. The class 100 research space hosts the most sensitive lithography process equipment. The utility chase houses support equipment such as water cooling, vacuum pumps, exhaust abatement, and compressed gas delivery systems.

Synonyms: Texas State University Nanofabrication Research Service Center (NRSC)

Resource Type: core facility, service resource, access service resource

Keywords: ABRF, fabricate films, structures, devices, micrometer and nanometer scale,

Expand All
Usage and Citation Metrics

We found {{ ctrl2.mentions.all_count }} mentions in open access literature.

We have not found any literature mentions for this resource.

We are searching literature mentions for this resource.

Most recent articles:

{{ mention._source.dc.creators[0].familyName }} {{ mention._source.dc.creators[0].initials }}, et al. ({{ mention._source.dc.publicationYear }}) {{ mention._source.dc.title }} {{ mention._source.dc.publishers[0].name }}, {{ mention._source.dc.publishers[0].volume }}({{ mention._source.dc.publishers[0].issue }}), {{ mention._source.dc.publishers[0].pagination }}. (PMID:{{ mention._id.replace('PMID:', '') }})

Checkfor all resource mentions.

Collaborator Network

A list of researchers who have used the resource and an author search tool

Find mentions based on location


{{ ctrl2.mentions.errors.location }}

A list of researchers who have used the resource and an author search tool. This is available for resources that have literature mentions.

Ratings and Alerts

No rating or validation information has been found for Texas State University Nanofabrication Research Service Center Core Facility.

No alerts have been found for Texas State University Nanofabrication Research Service Center Core Facility.

Data and Source Information