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URL: https://sro.txst.edu/sro-facilities/sro-nrsc/sro-nrsc-ee.html
Proper Citation: Texas State University E-Beam Evaporator system (RRID:SCR_028200)
Description: Facility Angstrom Engineering EvoVac is a thin film deposition system based on evaporation of source material that can deposit a wide range of materials including metals and inorganic compounds. Resistive evaporation results when electrical current heats a boat filled with source material whereas electron beam evaporation utilizes filament emission and magnetic focusing of a high energy electron beam which is swept within a crucible of deposition material. The deposition processes occur in a vacuum to permit long mean free paths from indexed multi-pocket sources at rates and terminal thicknesses controlled using a quartz rate sensor. The substrate can be heated, rotated, and plasma cleaned to control film morphology, uniformity, and adhesion. Vacuum-based deposition system that uses an electron beam to evaporate materials for high-purity thin film coatings with precise thickness control.
Synonyms: , E-Beam Evaporator (PVD75 E-Beam), E-Beam Deposition System, Electron Beam Evaporator
Resource Type: instrument resource
Keywords: Texas State University Nanofabrication Research Service Center Core Facility, electron beam evaporation, PVD, thin films, vacuum deposition, coatings
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