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URL: https://sro.txst.edu/sro-facilities/sro-nrsc/sro-nrsc-peald.html
Proper Citation: Texas State University PEALD System (RRID:SCR_028201)
Description: Facility plasma-enhanced atomic layer deposition (PEALD) system from Arradiance utilizes high-speed pulse valves to sequentially deliver reactants that combine to deposit thin films on the surface of a sample at temperatures up to 300C. Eight precursor positions (4 metalorganic + 4 oxidizer) and three plasma gases (N2, O2, H2) enable a wide range of films and process optimization. Plasma-enhanced atomic layer deposition system used for conformal, atomic-scale thin film growth with excellent uniformity and thickness control.
Synonyms: PEALD System (FlexAL-PEALD)
Resource Type: instrument resource
Keywords: PEALD, atomic layer deposition, thin films, plasma deposition, conformal coating,
Availability: Restricted
Resource Name: Texas State University PEALD System
Resource ID: SCR_028201
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Source: SciCrunch Registry (RRID:SCR_005400)
Description: Interactive portal for finding and submitting biomedical resources. Resources within SciCrunch have assigned RRIDs which are used to cite resources in scientific manuscripts. SciCrunch Registry, formerly NIF Registry, provides resources catalog. Allows to add new resources. Allows edit existing resources after registration. Curators are tasked with identifying and registering resources, examining data, writing configuration files to index and display data and keeping contents current.
URL: https://rrid.site/rin/sources/SCR_005400
