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University of Maine CORE Microfabrication Cleanroom Core Facility (RRID:SCR_028249)Copy Citation Copied
URL: https://umaine.edu/core/cleanroom/
Proper Citation: University of Maine CORE Microfabrication Cleanroom Core Facility (RRID:SCR_028249)
Description: Facility supports micro- and nanoscale fabrication, microsensor development, and atomic-scale materials synthesis. Provides comprehensive technical capabilities, including microlithography (mask aligners, photoresist processing, laser lithography), thin film deposition (e-beam evaporation, sputtering, PECVD, atomic layer deposition), and advanced characterization tools (profilometry, spectroscopic ellipsometry). Fabrication processes are supported by both dry etching (DRIE, RIE) and wet chemical processing (RCA clean, KOH etch, solvent benches), as well as thermal processing systems such as diffusion furnaces and rapid thermal annealing.
Synonyms: CORE Microfabrication Cleanroom
Resource Type: access service resource, core facility, service resource
Keywords: ABRF, micro- and nanoscale fabrication, microsensor development, atomic-scale materials synthesis,
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