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Texas State University Nanofabrication Research Service Center Core Facility (RRID:SCR_028199)Copy Citation Copied
URL: https://cro.txst.edu/nanofabrication-equipment/cro-nrsc-deposition.html
Proper Citation: Texas State University Nanofabrication Research Service Center Core Facility (RRID:SCR_028199)
Description: Multi-user clean room facility where students and researchers can fabricate films, structures, and devices at micrometer and nanometer scale. Users must enter through the gowning area that contains garments required to protect the cleanroom from particles. The class 10,000 instruction area houses high temperature furnaces, physical vapor deposition systems, wet chemical benches, chemical storage, and electrical test equipment utilized by undergraduate courses. The class 1000 research area houses deposition, etching, thermal treatment, and metrology equipment to support sponsored research and graduate coursework. The class 100 research space hosts the most sensitive lithography process equipment. The utility chase houses support equipment such as water cooling, vacuum pumps, exhaust abatement, and compressed gas delivery systems.
Synonyms: Texas State University Nanofabrication Research Service Center (NRSC)
Resource Type: access service resource, core facility, service resource
Keywords: ABRF, fabricate films, structures, devices, micrometer and nanometer scale,
Resource Name: Texas State University Nanofabrication Research Service Center Core Facility
Resource ID: SCR_028199
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Source: SciCrunch Registry (RRID:SCR_005400)
Description: Interactive portal for finding and submitting biomedical resources. Resources within SciCrunch have assigned RRIDs which are used to cite resources in scientific manuscripts. SciCrunch Registry, formerly NIF Registry, provides resources catalog. Allows to add new resources. Allows edit existing resources after registration. Curators are tasked with identifying and registering resources, examining data, writing configuration files to index and display data and keeping contents current.
URL: https://rrid.site/rin/sources/SCR_005400