URL: https://www.cameca.com/company/links/epma
Proper Citation: CAMECA SX100 Electron Probe Microanalyzer (RRID:SCR_028354)
Description: Fully automated instrument used for nondestructive, in-situ, micro-scale elemental characterization. It is generally equipped with five vertical crystal spectrometers (WDS) and an energy dispersive analyzer (EDS), operating via proprietary Windows-based Peak Sight software or updated with third-party software like Probe for EPMA.
Synonyms: SX100 Electron Probe Microanalyzer
Resource Type: instrument resource
Keywords: micro-scale elemental characterization, crystal spectrometer, energy dispersive analyzer,
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