URL: http://harvard.eagle-i.net/i/00000130-d6cd-1ce1-8a1b-bf0e80000000
Proper Citation: Edwards: Auto 306 e-beam Evaporator (RRID:SCR_019844)
Description: E-beam evaporator recommended for oxide and nitride materials. Designed to operate around the e-5 millibar vacuum range, EE-2 can also be used to deposit metals (non-toxic materials) if very low pressure is not a critical factor in your process. The water-cooled substrate holder can accommodate one wafer up to 3� diameter. EE-2 has a rotary-vane mechanical roughing pump and a turbo high-vacuum pump, and is a relatively low voltage (~3.8kV) electron beam evaporation deposition system with a 4-pocket, water-cooled rotating hearth.
Resource Type: instrument resource
Keywords: Edwards, Evaporator, Instrument Equipment, USEDit
Availability: Commercially available
Specification URL: https://raw.githubusercontent.com/SciCrunch/RRID-Instruments/main/PDF/SCR_019844.pdf
Resource Name: Edwards: Auto 306 e-beam Evaporator
Resource ID: SCR_019844
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Source: SciCrunch Registry (RRID:SCR_005400)
Description: Interactive portal for finding and submitting biomedical resources. Resources within SciCrunch have assigned RRIDs which are used to cite resources in scientific manuscripts. SciCrunch Registry, formerly NIF Registry, provides resources catalog. Allows to add new resources. Allows edit existing resources after registration. Curators are tasked with identifying and registering resources, examining data, writing configuration files to index and display data and keeping contents current.
URL: https://rrid.site/rin/sources/SCR_005400
