Northwestern University Materials Research Center Cleanroom Core Facility (RRID:SCR_017941)Copy Citation Copied
URL: http://mrsec.northwestern.edu/facilities/cleanroom/
Proper Citation: Northwestern University Materials Research Center Cleanroom Core Facility (RRID:SCR_017941)
Description: Cleanroom facility is devoted to materials processing, growth, device fabrication, characterization and electronic and photonic materials. Provides microfabrication and thin film processing capabilities. Facility includes class 100 and 1000 cleanrooms.Training of equipment and assisted use within facility is available to provide necessary expertise.Provides centralized resource for deposition of metal, semiconductor and dielectric thin films, photolithography, etching, bonding, dicing, characterization and materials processing.
Abbreviations: NUFAB-Cook Hall
Synonyms: Materials Processing and Microfabrication Facility
Resource Type: access service resource, core facility, service resource
Keywords: Cleanroom, material, processing, growth, device, fabrication, characterization, electronic, photonic, microfabrication, thin, film, metal, semiconductor, dielectric, photolithography, etching, bonding, dicing, service, core, ABRF
Funding: DMR 1720139
Availability: Open
Resource Name: Northwestern University Materials Research Center Cleanroom Core Facility
Resource ID: SCR_017941
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Source: SciCrunch Registry (RRID:SCR_005400)
Description: Interactive portal for finding and submitting biomedical resources. Resources within SciCrunch have assigned RRIDs which are used to cite resources in scientific manuscripts. SciCrunch Registry, formerly NIF Registry, provides resources catalog. Allows to add new resources. Allows edit existing resources after registration. Curators are tasked with identifying and registering resources, examining data, writing configuration files to index and display data and keeping contents current.
URL: https://rrid.site/rin/sources/SCR_005400
