URL: http://howard.eagle-i.net/i/00000135-5958-291c-bf4c-ca4080000000
Proper Citation: Howard Nanoscale Science and Engineering Facility (RRID:SCR_009867)
Description: Howard Nanoscale Science and Engineering Facility (HNF) occupies a specially renovated wing on the first floor of the Engineering Building.The five large laboratories cover ~6000 sq. ft. of space and the HNF has about 2000 sq ft of contiguous office space. The HNF is an established centralized user facility containing over $17M of micro- and nano fabrication and characterization equipment, accessible by external and internal academic, government and industrial users. Currently, HNF has integrated facilities in the following categories: Lithography Facilities Nanofabrication Facilities Plasma Etching / Deposition Facilities CVD Deposition Facilities (SiC,GaN) Nanomembrane Facilities Characterization Facilities Computer Facilities Societal and Ethical Issues
Resource Type: service resource, access service resource, core facility
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