University of Massachusetts Amherst Nanofabrication Cleanroom Core Facility (RRID:SCR_028977)Copy Citation Copied
URL: https://www.umass.edu/ials/core-facilities/nanofabrication-cleanroom
Proper Citation: University of Massachusetts Amherst Nanofabrication Cleanroom Core Facility (RRID:SCR_028977)
Description: Nanofabrication facility is part of a network of cleanroom laboratories. Training can be tailored to the specific set of processes or techniques needed to fabricate and test various devices or materials. Films of numerous metals and ceramics can be applied and patterning as small as 10 nm can be accomplished. A wet chemistry area provides a safe environment for the use of a variety of coatings, solvents, and etchants.
Synonyms: Nano fabrication
Resource Type: access service resource, core facility, service resource
Keywords: ABRF, fabricate and test various devices or materials,
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