Northwestern University Materials Research Center Cleanroom Core Facility (RRID:SCR_017941)Copy Citation Copied
URL: http://mrsec.northwestern.edu/facilities/cleanroom/
Proper Citation: Northwestern University Materials Research Center Cleanroom Core Facility (RRID:SCR_017941)
Description: Cleanroom facility is devoted to materials processing, growth, device fabrication, characterization and electronic and photonic materials. Provides microfabrication and thin film processing capabilities. Facility includes class 100 and 1000 cleanrooms.Training of equipment and assisted use within facility is available to provide necessary expertise.Provides centralized resource for deposition of metal, semiconductor and dielectric thin films, photolithography, etching, bonding, dicing, characterization and materials processing.
Abbreviations: NUFAB-Cook Hall
Synonyms: Materials Processing and Microfabrication Facility
Resource Type: access service resource, core facility, service resource
Keywords: Cleanroom, material, processing, growth, device, fabrication, characterization, electronic, photonic, microfabrication, thin, film, metal, semiconductor, dielectric, photolithography, etching, bonding, dicing, service, core, ABRF
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