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URL: http://nufab.northwestern.edu
Proper Citation: Northwestern University Micro/Nano Fabrication Facility (RRID:SCR_017944)
Description: Facility provides nanofabrication equipment and technical expertise.Supports research in all areas of science, engineering, medicine, and interdisciplinary fields. Equipment is located in clean room with laminar airflow and includes 3D Optical Profiler Zygo,Atomic Force Microscope Bruker Edge,Contact Angle Measurement VCA Optima XE,Electrical Test Station,Microscope Nikon LV150,Reflectometer Filmetrics F20,Spectroscopic Ellipsometer J.A. Woollam alpha-SE,Stylus Profilometer Veeco Dektak-8,Atomic Layer Deposition Arradiance GEMStar XT-P,E-beam Evaporator AJA,Parylene Coater SCS Labcoter2 Parylene Deposition System,Plasma Enhanced Chemical Vapor Deposition (PECVD) STS LpX CVD,Sputter I AJA Orion,Sputter II AJA Orion,Thermal Evaporator, Denton Vacuum Explorer 14,ETCHING ASHING,Deep Reactive Ion Etcher (DRIE) ,STS LpX Pegasus,Plasma Cleaner ,Samco PC-300,Reactive Ion Etcher (RIE) ,Samco RIE-10NR,Xenon Difluoride Etcher ,Xactix,Furnace ,Tystar,Rapid Thermal Processor ,AW-610,Laser Cutter, LPKF ProtoLaser R,Wire Bonder -Ball- iBond5000,Wire Bonder ,Wedge West Bond 747677E,Convection Ovens Blue M DCC-146-C-ST35,Mask Aligner ,Suss MABA6,Mask Aligner ,Suss MJB4,Maskless Aligner , Heidelberg MLA150,Maskless Aligner ,Heidelberg uPG501,Microscope Nikon LV150,Polyimide/SU8 Hood,Spinner Hood,Ultraviolet Flood Exposure System , Inpro Technologies F300S,Vacuum Oven,Acid Hoods,Critical Point Dryer ,Tousimis Automegasamdri 915B, Series C,Ultrasonic and Megasonic Cleaners.
Abbreviations: NUFAB
Synonyms: Micro/nano fabrication facility
Resource Type: core facility, service resource, access service resource
Keywords: Micro, nano, fabrication, equipment, technical, expertise, clean, room, laminar, airflow, service, core, ABRF
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