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Proper Citation: University of Kansas Nanofabrication Core Facility (RRID:SCR_028756)
Description: Provides manufacturing micro- and nanofluidic devices for biomedical research, equipment and resources for applications with micro- and nanofabrication needs. Facility conisists of ISO class 7 cleanroom space, housing tools and materials for techniques including photolithography, nano-imprint lithography, plasma (dry) etching (ICP-RIE), wet etching, thin film deposition, scanning electron microscopy (VP-SEM), atomic force microscopy, contact angle goniometry, ellipsometry, profilometry, wafer dicing, wire bonding, laser ablation and engraving, 3D printing, hot embossing, and COMSOL software for device modeling. In addition, the facility has numerous microscopes for general inspection, ovens and furnaces, ultrapure water, and dedicated process fume hoods.
Synonyms: University of Kansas Nanofabrication Facility (KUNF)
Resource Type: access service resource, core facility, service resource
Keywords: ABRF, nanofabrication cleanroom facility, biomedical research device, device manufacturing,
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