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URL: https://sro.txst.edu/sro-facilities/sro-nrsc.html
Proper Citation: Texas State University AJA Magnetron Sputter System (RRID:SCR_028194)
Description: Our AJA International, Inc. ATC Orion is a thin film deposition system based on physical ablation of target material by five (2RF/3DC) independently powered magnetron sputter sources. Substrates with maximum diameter of 100mm are load lock transferred to main chamber on Molybdenum substrate holder with variety of features including heating, rotation, Z motion, and RF biasing. Main chamber vacuum system consists of turbo-molecular pump, gate valve, mechanical pump, and 3 vacuum gauges. Quartz crystal monitor may be employed internally for rate calibration. Internal interlocks protect system/user from aberrant power, water, and vacuum states. Labview-based computer control allows for process development and automated sequencing. Physical vapor deposition system that deposits uniform thin films using magnetron sputtering in controlled vacuum environment.
Synonyms: , AJA International, Texas State University Magnetron Sputtering System, Inc. ATC Orion Sputter Coater
Resource Type: instrument resource
Keywords: Thin film deposition, nanofabrication, sputtering, thin films, PVD, deposition, coating
Availability: Open
Resource Name: Texas State University AJA Magnetron Sputter System
Resource ID: SCR_028194
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Source: SciCrunch Registry (RRID:SCR_005400)
Description: Interactive portal for finding and submitting biomedical resources. Resources within SciCrunch have assigned RRIDs which are used to cite resources in scientific manuscripts. SciCrunch Registry, formerly NIF Registry, provides resources catalog. Allows to add new resources. Allows edit existing resources after registration. Curators are tasked with identifying and registering resources, examining data, writing configuration files to index and display data and keeping contents current.
URL: https://rrid.site/rin/sources/SCR_005400
