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URL: https://www.rigaku.com/products/semi/txrf3800e
Proper Citation: Rigaku: TXRF 3800e (RRID:SCR_020490)
Description: Surface contamination metrology that measures elemental contamination at discrete points or with full wafer maps.
Resource Type: instrument resource
Keywords: Rigaku, Semiconductor Metrology, Instrument Equipment, USEDit,
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