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Resource Name
RRID:SCR_020490 RRID Copied      
PDF Report How to cite
Rigaku: TXRF 3800e (RRID:SCR_020490)
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Resource Information

URL: https://www.rigaku.com/products/semi/txrf3800e

Proper Citation: Rigaku: TXRF 3800e (RRID:SCR_020490)

Description: Surface contamination metrology that measures elemental contamination at discrete points or with full wafer maps.

Resource Type: instrument resource

Keywords: Rigaku, Semiconductor Metrology, Instrument Equipment, USEDit,

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