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URL: https://www.rigaku.com/products/semi/onyx
Proper Citation: Rigaku: Onyx 3000 (RRID:SCR_020455)
Description: Hybrid XRF and optical metrology fab tool. Used for thickness, composition, defect identification and sizing of films and structures on blanket and patterned wafers.
Resource Type: instrument resource
Keywords: Rigaku, Semiconductor Metrology, Instrument Equipment, USEDit,
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